Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers

Maria Villarroya Gaudó; Gabriel Abadal; Jaume Verd; Jordi Teva; Francesc Pérez-Murano; Eduardo Figueras Costa; Josep Montserrat; Arantxa Uranga; Jaume Esteve; Núria Barniol

doi:10.1109/TNANO.2007.901477

Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers

Maria Villarroya Gaudó, Gabriel Abadal, Jaume Verd, Jordi Teva, Francesc Pérez-Murano, Eduardo Figueras Costa, Josep Montserrat, Arantxa Uranga, Jaume Esteve, Núria Barniol

Departamento de Ingeniería Electrónica

Producción científica: Contribución a una revista › Artículo › Investigación › revisión exhaustiva

10 Citas (Scopus)

Resumen

The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass. © 2007 IEEE.

Idioma original	Inglés
Páginas (desde-hasta)	509-512
Publicación	IEEE Transactions on Nanotechnology
Volumen	6
N.º	5
DOI	https://doi.org/10.1109/TNANO.2007.901477
Estado	Publicada - 1 sept 2007

Acceder al documento

10.1109/TNANO.2007.901477

Citar esto

Gaudó, M. V., Abadal, G., Verd, J., Teva, J., Pérez-Murano, F., Costa, E. F., Montserrat, J., Uranga, A., Esteve, J., & Barniol, N. (2007). Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers. IEEE Transactions on Nanotechnology, 6(5), 509-512. https://doi.org/10.1109/TNANO.2007.901477

@article{20d03664b855497d9419f289ca59cace,

title = "Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers",

abstract = "The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass. {\textcopyright} 2007 IEEE.",

keywords = "Attoliter, Cantilever based mass sensor, CMOS-MEMS, Dynamics of evaporation, Evaporation rate",

author = "Gaud{\'o}, {Maria Villarroya} and Gabriel Abadal and Jaume Verd and Jordi Teva and Francesc P{\'e}rez-Murano and Costa, {Eduardo Figueras} and Josep Montserrat and Arantxa Uranga and Jaume Esteve and N{\'u}ria Barniol",

year = "2007",

month = sep,

day = "1",

doi = "10.1109/TNANO.2007.901477",

language = "English",

volume = "6",

pages = "509--512",

journal = "IEEE Transactions on Nanotechnology",

issn = "1536-125X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "5",

}

Gaudó, MV, Abadal, G, Verd, J, Teva, J, Pérez-Murano, F, Costa, EF, Montserrat, J, Uranga, A, Esteve, J & Barniol, N 2007, 'Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers', IEEE Transactions on Nanotechnology, vol. 6, n.º 5, pp. 509-512. https://doi.org/10.1109/TNANO.2007.901477

Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers. / Gaudó, Maria Villarroya; Abadal, Gabriel; Verd, Jaume et al.
En: IEEE Transactions on Nanotechnology, Vol. 6, N.º 5, 01.09.2007, p. 509-512.

Producción científica: Contribución a una revista › Artículo › Investigación › revisión exhaustiva

TY - JOUR

T1 - Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers

AU - Gaudó, Maria Villarroya

AU - Abadal, Gabriel

AU - Verd, Jaume

AU - Teva, Jordi

AU - Pérez-Murano, Francesc

AU - Costa, Eduardo Figueras

AU - Montserrat, Josep

AU - Uranga, Arantxa

AU - Esteve, Jaume

AU - Barniol, Núria

PY - 2007/9/1

Y1 - 2007/9/1

N2 - The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass. © 2007 IEEE.

AB - The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass. © 2007 IEEE.

KW - Attoliter

KW - Cantilever based mass sensor

KW - CMOS-MEMS

KW - Dynamics of evaporation

KW - Evaporation rate

U2 - 10.1109/TNANO.2007.901477

DO - 10.1109/TNANO.2007.901477

M3 - Article

SN - 1536-125X

VL - 6

SP - 509

EP - 512

JO - IEEE Transactions on Nanotechnology

JF - IEEE Transactions on Nanotechnology

IS - 5

ER -

Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers

Resumen

Acceder al documento

Huella

Citar esto