Theoretical and experimental investigations of single- and multilayer structures with SiGe nanoislands

V. O. Yukhymchuk, A. M. Yaremko, M. Ya Valakh, A. V. Novikov, E. V. Mozdor, P. M. Lytvyn, Z. F. Krasilnik, V. P. Klad'ko, V. M. Dzhagan, N. Mestres, J. Pascual

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Resumen

The influence of geometrical and physical parameters of self-assembled SiGe/Si nanoislands on their energy has been investigated theoretically. The island energy minimum was shown to depend on the growth temperature and Si content in the islands. The results of the theoretical calculations are compared with experimental data obtained by atomic force microscopy and Raman spectroscopy (RS). © 2003 Elsevier B.V. All rights reserved.
Idioma originalInglés
Páginas (desde-hasta)1027-1031
PublicaciónMaterials Science and Engineering C
Volumen23
N.º6-8
DOI
EstadoPublicada - 15 dic 2003

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