Study of the influence of nonuniform pupils in photolithographic systems through the apparent transfer function

M.J. Yzuel, R. Hild, J. Campos, J.C. Escalera

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@article{3b4b9a2c4ae04890b73059b9efd08a03,

title = "Study of the influence of nonuniform pupils in photolithographic systems through the apparent transfer function",

author = "M.J. Yzuel and R. Hild and J. Campos and J.C. Escalera",

year = "1996",

month = jan,

day = "1",

language = "English",

volume = "2774",

pages = "369--377",

journal = "Proc. SPIE",

issn = "0277-786X",

}