Strategies for CMOS-MEMS integration in a submicrometric commercial CMOS technology

J L Lopez, J Verd, J Teva, G. Murillo, J. Giner, A. Uranga, G. Abadal, N. Barniol

Producción científica: Contribución a una revista › Artículo › Investigación

Idioma original	Inglés
Páginas (desde-hasta)	---
Publicación	Journal of micromechanics and microengineering : structures, devices and systems
Volumen	19
Estado	Publicada - 1 ene 2009

Citar esto

@article{c9106d1b7c6744548df2ea6411fecd3c,

title = "Strategies for CMOS-MEMS integration in a submicrometric commercial CMOS technology",

author = "Lopez, {J L} and J Verd and J Teva and G. Murillo and J. Giner and A. Uranga and G. Abadal and N. Barniol",

year = "2009",

month = jan,

day = "1",

language = "English",

volume = "19",

pages = "------",

}

TY - JOUR

T1 - Strategies for CMOS-MEMS integration in a submicrometric commercial CMOS technology

AU - Lopez, J L

AU - Verd, J

AU - Teva, J

AU - Murillo, G.

AU - Giner, J.

AU - Uranga, A.

AU - Abadal, G.

AU - Barniol, N.

PY - 2009/1/1

Y1 - 2009/1/1

M3 - Article

SN - 0960-1317

VL - 19

SP - ---

JO - Journal of micromechanics and microengineering : structures, devices and systems

JF - Journal of micromechanics and microengineering : structures, devices and systems

ER -