@inbook{af4e910f7af441afb6ba0d1985e64475,
title = "Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\textbackslash{}mum CMOS process",
author = "J. Verd and G. Abadal and J. Teva and A. Uranga and F. P{\'e}rez-Murano and J. Esteve and N. Barniol",
year = "2006",
month = jan,
day = "1",
language = "English",
isbn = "978-0-7803-9475-9",
pages = "638--641",
booktitle = "MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006",
edition = "1",
}