@article{288633fd0b4c4212a641e615134541ee,
title = "Micropower thermoelectric generator from thin Si membranes",
abstract = "We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5μW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.",
keywords = "Low-dimensional Si, Planar thermoelectric generator, Power output, Si membrane",
author = "Perez-Mar{\'i}n, {A. P.} and Lopeand{\'i}a, {A. F.} and Ll Abad and P. Ferrando-Villaba and Lopez, {A. M.} and Mu{\~n}oz-Pascual, {F. X.} and J. Rodr{\'i}guez-Viejo and {Garcia Alonso}, Gemma",
note = "Funding Information: Researchers from GNaM acknowledge financial support from Generalitat de Catalunya SGR2009-01225 , from the Ministerio de Industria TSI-020100-2011-0354 (Avanza Si4Te), from the Ministerio de Econom{\'i}a y Competitividad CSD2010-00044 ( Consolider NANOTHERM ) and MAT2010-15202 and from the Marie Curie European Reintegration Grant within the 7th European Community Framework Programme . PFV acknowledge Ministerio de Educaci{\'o}n, Cultura y Deporte his FPU predoctoral fellowship and Ll. Abad acknowledge CSIC for her JAE-DOC postdoctoral contract partially funded by ESF. ",
year = "2014",
month = mar,
doi = "10.1016/j.nanoen.2013.12.007",
language = "English",
volume = "4",
pages = "73--80",
journal = "Nano Energy",
issn = "2211-2855",
publisher = "Elsevier BV",
}
