Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

Producción científica: Contribución a una revistaArtículoInvestigaciónrevisión exhaustiva

Resumen

This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 μm CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing.
Idioma originalInglés
PublicaciónSensors
Volumen23
N.º21
DOI
EstadoPublicada - 3 nov 2023

Huella

Profundice en los temas de investigación de 'Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection'. En conjunto forman una huella única.

Citar esto