@inbook{3bca0a4577624a9aa61a1ede46aeb5e2,
title = "MEMS with integrated CMOS read-out circuit based on submicrometric cantilevers array for multiple sensing",
author = "M. Villarroya and J. Verd and J. Teva and G. Abadal and E. Figueras and F. P{\'e}rez-Murano and J. Esteve and N. Barniol",
year = "2005",
month = may,
day = "1",
language = "English",
isbn = "978-0-8194-5831-5",
series = "Proceedings of SPIE; 5836",
pages = "78--85",
booktitle = "SPIE International Symposium on Microtechnologies for The New Millenium",
edition = "1",
}