MEMS Mass sensor with atto-gram/Hz sensitivity based on a polysilicon cantilever array integrated monolithically with CMOS circuit

M. Villarroya; J. Teva; E. Forsen; J. Verd; G. Abadal; J. Montserrat; J. Esteve; F. Pérez-Murano; A. Boisen; N. Barniol

MEMS Mass sensor with atto-gram/Hz sensitivity based on a polysilicon cantilever array integrated monolithically with CMOS circuit

M. Villarroya, J. Teva, E. Forsen, J. Verd, G. Abadal, J. Montserrat, J. Esteve, F. Pérez-Murano, A. Boisen, N. Barniol

Departamento de Ingeniería Electrónica

Producción científica: Capítulo de libro › Capítulo › Investigación

Idioma original	Inglés
Título de la publicación alojada	EUROSENSORS XIX BARCELONA. SPAIN 11th-14th September 2005
Lugar de publicación	Barcelona (ES)
Páginas	-
Edición	1
Estado	Publicada - 1 ene 2005

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title = "MEMS Mass sensor with atto-gram/Hz sensitivity based on a polysilicon cantilever array integrated monolithically with CMOS circuit",

author = "M. Villarroya and J. Teva and E. Forsen and J. Verd and G. Abadal and J. Montserrat and J. Esteve and F. P{\'e}rez-Murano and A. Boisen and N. Barniol",

year = "2005",

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language = "English",

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T1 - MEMS Mass sensor with atto-gram/Hz sensitivity based on a polysilicon cantilever array integrated monolithically with CMOS circuit

AU - Villarroya, M.

AU - Teva, J.

AU - Forsen, E.

AU - Verd, J.

AU - Abadal, G.

AU - Montserrat, J.

AU - Esteve, J.

AU - Pérez-Murano, F.

AU - Boisen, A.

AU - Barniol, N.

PY - 2005/1/1

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BT - EUROSENSORS XIX BARCELONA. SPAIN 11th-14th September 2005

CY - Barcelona (ES)

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