TY - JOUR
T1 - Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR)
T2 - Area and mass location aspects
AU - Campanella, Humberto
AU - Uranga, Arantxa
AU - Romano-Rodríguez, Albert
AU - Montserrat, Josep
AU - Abadal, Gabriel
AU - Barniol, Nuria
AU - Esteve, Jaume
N1 - Funding Information:
This work has been supported by Seiko EPSON Corporation , through its European branch EPSON Europe Electronics GmbH and EPSON's Barcelona Research and Development Laboratory (BRDL). H. Campanella would like to thank to C. Golden for fruitful discussions and helpful guidance.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2008/3/10
Y1 - 2008/3/10
N2 - Localized-mass sensors using thin-film bulk acoustic resonators (FBAR) have been implemented for the study of sensitivity and possible configurations in biological applications. In a first experiment, a group of resonators are loaded with the same amount of mass but different contact areas, achieving responsivities as high as 10-19 g/Hz, and potential sensitivities in the order of 10-14 g. These numbers are at least one order of magnitude higher than those obtained for uniform thin-film loadings, although it is clear that sensitivity decreases with the area of the localized-mass. The current phase-noise levels and the quality factor of resonators would allow measuring frequency changes of 30 kHz - the minimum measured frequency shifting has been 500 kHz so far - due to a mass deposition of 9.0 × 10-15 g. In a second experiment, localized-loadings with the same mass are located in different positions of the top electrodes of the corresponding FBARs. It was found out that a location change of the mass in the electrode causes different magnitudes of frequency shifting. A discussion on these topics is opened, in order to define future applications and research lines concerning localized-mass sensing in FBARs.
AB - Localized-mass sensors using thin-film bulk acoustic resonators (FBAR) have been implemented for the study of sensitivity and possible configurations in biological applications. In a first experiment, a group of resonators are loaded with the same amount of mass but different contact areas, achieving responsivities as high as 10-19 g/Hz, and potential sensitivities in the order of 10-14 g. These numbers are at least one order of magnitude higher than those obtained for uniform thin-film loadings, although it is clear that sensitivity decreases with the area of the localized-mass. The current phase-noise levels and the quality factor of resonators would allow measuring frequency changes of 30 kHz - the minimum measured frequency shifting has been 500 kHz so far - due to a mass deposition of 9.0 × 10-15 g. In a second experiment, localized-loadings with the same mass are located in different positions of the top electrodes of the corresponding FBARs. It was found out that a location change of the mass in the electrode causes different magnitudes of frequency shifting. A discussion on these topics is opened, in order to define future applications and research lines concerning localized-mass sensing in FBARs.
KW - BAW
KW - FBAR
KW - Mass sensors
KW - Responsivity and sensitivity of sensors
KW - Thin-film bulk acoustic wave resonators
UR - http://www.scopus.com/inward/record.url?scp=38849102299&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2007.05.004
DO - 10.1016/j.sna.2007.05.004
M3 - Article
SN - 0924-4247
VL - 142
SP - 322
EP - 328
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1
ER -