Resumen
An empirical one parameter-based power law model for the leakage current through one or more soft breakdown spots in ultrathin (<5 nm) gate oxides is presented. Good fit to data can be obtained in nearly five decades of current from 0.5 to 5 V. In addition, it is shown that there exists a slight correlation between the parameters which describe the soft breakdown conduction characteristic and the stressing condition which triggers it.
Idioma original | Inglés |
---|---|
Páginas (desde-hasta) | 265-267 |
Publicación | IEEE Electron Device Letters |
Volumen | 20 |
DOI | |
Estado | Publicada - 1 jun 1999 |