Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 μm) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER.