Resumen
Metal nanogap test structures are used to demonstrate the field-effect control of the conduction through dielectric breakdown paths in W/HfO 2/W structures. Variations of the size of the conducting filament in the nanogap are demonstrated by current compliance limited voltage ramps and by a partial reset method.
Idioma original | Inglés |
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Páginas (desde-hasta) | 177-180 |
Número de páginas | 4 |
Publicación | ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day' |
DOI | |
Estado | Publicada - 2013 |