Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga; J. Verd; F. Torres; J. Teva; J. L. López; G. Abadal; J. Esteve; F. Pérez-Murano; N. Barniol

doi:10.1016/j.mee.2007.01.114

Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga^*, J. Verd, F. Torres, J. Teva, J. L. López, G. Abadal, J. Esteve, F. Pérez-Murano, N. Barniol

^*Autor correspondiente de este trabajo

Departamento de Ingeniería Electrónica

Producción científica: Contribución a una revista › Artículo › Investigación › revisión exhaustiva

6 Citas (Scopus)

Resumen

The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.

Idioma original	Inglés
Páginas (desde-hasta)	1374-1378
Número de páginas	5
Publicación	Microelectronic Engineering
Volumen	84
N.º	5-8
DOI	https://doi.org/10.1016/j.mee.2007.01.114
Estado	Publicada - may 2007

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title = "Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever",

abstract = "The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.",

keywords = "Cantilever-based-sensors, CMOS-MEMS, Resonant cantilever",

author = "A. Uranga and J. Verd and F. Torres and J. Teva and L{\'o}pez, {J. L.} and G. Abadal and J. Esteve and F. P{\'e}rez-Murano and N. Barniol",

year = "2007",

month = may,

doi = "10.1016/j.mee.2007.01.114",

language = "English",

volume = "84",

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journal = "Microelectronic Engineering",

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T1 - Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

AU - Uranga, A.

AU - Verd, J.

AU - Torres, F.

AU - Teva, J.

AU - López, J. L.

AU - Abadal, G.

AU - Esteve, J.

AU - Pérez-Murano, F.

AU - Barniol, N.

PY - 2007/5

Y1 - 2007/5

N2 - The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.

AB - The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.

KW - Cantilever-based-sensors

KW - CMOS-MEMS

KW - Resonant cantilever

UR - http://www.scopus.com/inward/record.url?scp=34247556011&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2007.01.114

DO - 10.1016/j.mee.2007.01.114

M3 - Article

AN - SCOPUS:34247556011

SN - 0167-9317

VL - 84

SP - 1374

EP - 1378

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -

Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

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