Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing

Keyphrases

• CMOS-MEMS 100%
• Resonant Sensing 100%
• Injection Locking 100%
• Injection-locked Oscillator 100%
• Sensor-based 50%
• System Design 50%
• Resonant Sensor 50%
• Strongly Coupled 50%
• Differential Sensor 50%
• Design Guidelines 50%
• Sensitivity Enhancement 50%
• Drift Rejection 50%
• Integrated CMOS 50%
• Thermal Drift 50%
• Digital Mixer 50%
• Actuation Voltage 50%
• MEMS Resonator 50%
• Phase Difference 50%

Engineering

• Microelectromechanical System 100%
• Oscillator 100%
• Experimental Result 66%
• Proof-of-Concept 33%
• Design Guideline 33%
• Optimal Design 33%
• Mixers (Machinery) 33%
• Resonant Sensor 33%
• Simulated Result 33%
• Phase Difference 33%
• Resonator 33%
• Actuation 33%
• Critical Point 33%