Assessing the correlation between location and size of catastrophic breakdown events in high-k mim capacitors

Keyphrases

• Catastrophic Breakdown 100%
• Capacitors 100%
• Spot Position 100%
• Failure Site 100%
• Affected Area 50%
• Thermal Effect 50%
• Dielectric 50%
• HfO2 50%
• Constant Voltage Stress 50%
• High Permittivity Dielectrics 50%
• Dielectric Film 50%
• Point Pattern 50%
• Structural Modification 50%
• Dielectric Layer 50%
• Metal-insulator-metal Capacitor 50%
• Number of Spots 50%
• Ramp Voltage Stress 50%
• Top Electrode 50%
• High Energy Dissipation 50%
• Statistical Considerations 50%
• Spatial Location 50%
• Micro-explosion 50%
• Mark Correlation Function 50%
• Complete Spatial Randomness 50%
• Spot Size 50%
• Multiple Failure Modes 50%
• Visible Area 50%
• Conditional Moments 50%
• Correlation Evaluation 50%

Engineering

• Metal-Insulator-Metal 100%
• Spatial Location 100%
• Energy Dissipation 100%
• Dielectric Layer 100%
• Constant Voltage 100%
• Structural Modification 100%
• Dielectrics 100%
• Thermal Effect 100%
• Dielectric Films 100%

Material Science

• Capacitor 100%
• Dielectric Material 66%
• Permittivity 33%
• Dielectric Films 33%