Nanosensorators with Integrated circuitry for high sensitivity and high resolution mass detection - NANOMASS II

FP5 Project Record 1 . Nanoresonators with Integrated circuitry for high sensitivity and high resolution mass detection General Project Information FP5 Programme Acronym: IST Project Reference: IST-2001-33068 Contract Type: Cost-sharing contracts Start Date: 2001-10-01 End Date: 2004-09-30 Duration: 36 months Project Status: Execution Project Acronym: NANOMASS II Update Date: 2003-03-05 Project Description The objective of the project is the development of the technologies for the combination of CMOS circuitry with nanotechnology processes and techniques for the fabrication of mechanical mass sensors based on an array of nanometer scale silicon cantilevers. The prototype will allow monitoring multiple physical and/or chemical processes. It can be applied as a very compact and sensitive environmental or biochemical sensor. To fabricate the devices an innovative approach is proposed based on the combination of novel nanolithographic techniques with standard CMOS technology. The feasibility of the approach has been proved in the first phase. In the second phase, the devices will be optimised in terms of fabrication, performance and functionality by: (i) using new nanolithography techniques and SOI substrates (ii) improving sensitivity and resolution and (iii) increasing circuit functionality.