Keyphrases
Resonator
45%
Complementary Metal Oxide Semiconductor
38%
CMOS-MEMS
37%
CMOS Technology
37%
Cantilever
33%
Monolithically Integrated
27%
Mass Sensor
25%
Integrated CMOS
22%
Fully Integrated
20%
Resonant Frequency
20%
Polysilicon
20%
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
19%
Scanning Tunneling Microscope
19%
MEMS Resonator
18%
Nanoelectromechanical Systems
18%
Nanometer Scale
17%
On chip
15%
Si(100) Surface
15%
Clamped Beam
14%
Film Bulk Acoustic Resonator
14%
Scanning Tunneling Microscopy
14%
Micro-electro-mechanical Systems
14%
SiO2 Film
12%
Complementary Metal-oxide-semiconductor Technology
12%
Beam Resonators
12%
Standard CMOS Technology
12%
Oxides
12%
CMOS Circuits
11%
In Situ
11%
NEMS Resonator
11%
Aluminum Scandium Nitride (AlScN)
11%
Silica
10%
(100) Surfaces
10%
Frequency Response
10%
Resonant Cantilever
10%
Circuitry
10%
Micromechanics
10%
Microelectromechanical Systems (MEMS) Resonator
9%
Sensor-based
9%
Fabrication Methods
9%
MOS Structure
9%
Metal Layer
9%
Mass Sensing
9%
Filter Method
8%
Scanning Near-field Optical Microscopy
8%
Focused Ion Beam
8%
Nanocantilever
8%
RF MEMS Resonator
8%
Silicon Oxide
8%
High Sensitivity
8%
Engineering
Resonator
100%
Microelectromechanical System
94%
Transducer
41%
Complementary Metal-Oxide-Semiconductor
38%
Oscillator
26%
Piezoelectric
20%
Nanometre
20%
Capacitive
19%
Scanning Tunneling Microscopy
19%
Ultrasonics
18%
Amplifier
16%
Resonance Frequency
16%
Silicon Dioxide
16%
Thin Films
15%
Scanning Tunneling Microscope
14%
Polysilicon
13%
Sio2 Film
13%
Lithography
12%
Q Factor
10%
Responsivity
10%
Frequency Response
9%
Electrostatic Force
9%
Bandpass Filter
8%
Phase Noise
8%
Microcantilevers
8%
Monolithic Integration
8%
Silicon Surface
8%
Tunnel Construction
7%
High Resolution
7%
Focused Ion Beam
7%
Crystalline Silicon
7%
Energy Engineering
7%
Echo Pulse
7%
Electric Field
7%
Glycerol
6%
Metal Layer
6%
Electromechanical System
6%
Parasitic Capacitance
6%
Silicon Oxide
6%
Front End
6%
Metal Oxide Semiconductor
5%
Evaporation Rate
5%
Gate Oxide
5%
Tapping Mode Atomic Force Microscopy
5%
Statistical Distribution
5%
Atomic Force Microscope
5%
Tapping Mode
5%
Aqueous Solution
5%
Nanoelectromechanical System
5%
Nanowire
5%
