Resonadores micromecanizados para su aplicación en la detección de gases

Abstract

In this work, the objective consists on design, fabricate and characterise new micromechanical structures for gas sensor application. Silicon micromechanical technology has been used for the fabrication of resonant gas sensor. Two technologies have been used: surface and bulk micromachining. The resonant devices fabricated on these technologies, combine with the use of a specific polymeric layer, allow to detect VOCs. Polymers, as a sensitive layer, increment its mass in a Dm. This mass variation (Dm) produces a decrement on the resonant frequency of the structure and so on, allow to determine VOCs quantitatively. The proposed structures have reduce dimensions, high resonant frequencies and high sensibility. This thesis has two Spanish support projects: "Jamotrón" and "Migra". The topic of this projects has been developed on micromechanical microsensors. Silicon is used as substrate in microelectronic technologies, for its mechanical and electrical properties. Silicon is the base of the development of integrated circuits, sensors and actuators. Specially, mechanical sensors has experimented a quickly development due to lot of industrial applications. Actually, industry spreads to improve the sensors characteristics with investigations, new designs and new technologies. Silicon technology allows to fabricate devices to detect mechanical and thermal parameters with high precision and reliability. This work studies the different microtechnologies to fabricate resonant structures and to obtain diminutive dimensions and high sensitivity.

Date of Award	23 Jun 2004
Original language	Undefined/Unknown
Supervisor	Carles Cané Ballart (Director), Eduard Figueras Costa (Director) & Francesc Serra Mestres (Tutor)