Focused ion beam implantation as a tool for the fabrication of nanoelectromechanical devices

    Student thesis: Doctoral thesis

    Date of Award18 Mar 2016
    Original languageUndefined/Unknown
    Awarding Institution
    • Institute of Microelectronics of Barcelona (IMB-CNM, CSIC)
    SupervisorFrancesc Pérez Murano (Director), Xavier Borrisé Nogué (Director) & Jordi Sort Viñas (Tutor)

    Cite this

    Links

    '