The aim of this work is to study both the mechanical and the structural properties of yttria-stabilized zirconia (YSZ) coatings prepared on metallic substrates. YSZ films were obtained in a hot wall MOCVD reactor using Zr(thd)4 and Y(thd)3 as organometallic precursors. The evaporation and the deposition temperatures were chosen in order to stabilize the cubic phase of the zirconia. The coatings were produced on different nickel and chromium alloys substrates. X-ray diffraction and SIMS techniques were used to characterize the influence of different experimental parameters, such as substrate nature, deposition temperature and thermal treatment, on the structure and composition of the YSZ film and the film/substrate interface. Mechanical properties of the coatings were also determined, before and after heat treatment, by means of microindentation tests.