Workfunction fluctuations in polycrystalline TiN observed with KPFM and their impact on MOSFETs variability

A. Ruiz, N. Seoane, S. Claramunt, A. Garciá-Loureiro, M. Porti, C. Couso, J. Martin-Martinez, M. Nafria

Research output: Contribution to journalArticleResearch

4 Citations (Scopus)

Fingerprint Dive into the research topics of 'Workfunction fluctuations in polycrystalline TiN observed with KPFM and their impact on MOSFETs variability'. Together they form a unique fingerprint.

Physics & Astronomy