VHFCMOS-MEMS resonator monolithically integrated in a standard 0.35 mu m CMOS technology

J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J. L. Lopez, J. Esteve, F. Perez-Murano, N. Barniol, IEEE

Research output: Contribution to journalArticleResearchpeer-review

Original languageUndefined/Unknown
JournalProceedings of the Ieee Twentieth Annual International Conference on Micro Electro Mechanical Systems, Vols 1 and 2
Publication statusPublished - 2007

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