VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator

J. Giner, A. Uranga, J. L. Muñoz-Gamarra, E. Marigó, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

2 Citations (Scopus)

Abstract

Presented is a fully integrated solution on CMOS technology for achieving a longitudinal bulk acoustic wave microelectromechanical resonator. The capacitive polysilicon module present in the AMS 0.35 μm commercial CMOS technology is used to implement a longitudinal bar with a gap of 40nm using the interpoly oxide as spacer. Measurements, in air, show a resonance frequency of 258MHz. © 2012 The Institution of Engineering and Technology.
Original languageEnglish
Pages (from-to)514-516
JournalElectronics Letters
Volume48
DOIs
Publication statusPublished - 26 Apr 2012

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