@inbook{7856565849ff41129848fef9ea10a41a,
title = "VHF CMOS-MEMS resonator monolithicaly integrated in a standard 0.35\textbackslash{}mum CMOS technology",
author = "J. Teva and G. Abadal and A. Uranga and J. Verd and F. Torres and J.Ll L{\'o}pez and J. Esteve and F. P{\'e}rez-Murano and N. Barniol",
year = "2007",
month = jan,
day = "1",
language = "English",
isbn = "978-1-4244-0950-1",
pages = "779--782",
booktitle = "20th IEEE international conference on micro electro mechanical systems. MEMS 2007",
edition = "1",
}