VHF CMOS-MEMS resonator monolithicaly integrated in a standard 0.35\mum CMOS technology

J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J.Ll López, J. Esteve, F. Pérez-Murano, N. Barniol

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	20th IEEE international conference on micro electro mechanical systems. MEMS 2007
Place of Publication	Kobe (JP)
Pages	779-782
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2007

Cite this

@inbook{7856565849ff41129848fef9ea10a41a,

title = "VHF CMOS-MEMS resonator monolithicaly integrated in a standard 0.35\mum CMOS technology",

author = "J. Teva and G. Abadal and A. Uranga and J. Verd and F. Torres and J.Ll L{\'o}pez and J. Esteve and F. P{\'e}rez-Murano and N. Barniol",

year = "2007",

month = jan,

day = "1",

language = "English",

isbn = "978-1-4244-0950-1",

pages = "779--782",

booktitle = "20th IEEE international conference on micro electro mechanical systems. MEMS 2007",

edition = "1",

}

20th IEEE international conference on micro electro mechanical systems. MEMS 2007. 1. ed. Kobe (JP), 2007. p. 779-782.

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - VHF CMOS-MEMS resonator monolithicaly integrated in a standard 0.35\mum CMOS technology

AU - Teva, J.

AU - Abadal, G.

AU - Uranga, A.

AU - Verd, J.

AU - Torres, F.

AU - López, J.Ll

AU - Esteve, J.

AU - Pérez-Murano, F.

AU - Barniol, N.

PY - 2007/1/1

Y1 - 2007/1/1

M3 - Chapter

SN - 978-1-4244-0950-1

SP - 779

EP - 782

BT - 20th IEEE international conference on micro electro mechanical systems. MEMS 2007

CY - Kobe (JP)

ER -