VHF CMOS-MEMS resonator monolithicaly integrated in a standard 0.35\mum CMOS technology

J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J.Ll López, J. Esteve, F. Pérez-Murano, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publication20th IEEE international conference on micro electro mechanical systems. MEMS 2007
Place of PublicationKobe (JP)
Number of pages3
Publication statusPublished - 1 Jan 2007

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