Original language | English |
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Title of host publication | 20th IEEE international conference on micro electro mechanical systems. MEMS 2007 |
Place of Publication | Kobe (JP) |
Pages | 779-782 |
Number of pages | 3 |
Edition | 1 |
Publication status | Published - 1 Jan 2007 |
VHF CMOS-MEMS resonator monolithicaly integrated in a standard 0.35\mum CMOS technology
J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J.Ll López, J. Esteve, F. Pérez-Murano, N. Barniol
Research output: Chapter in Book › Chapter › Research