Using defocus in optical inspection of integrated circuits

X. Binefa, J. Sànchez, F.X. Pérez, X. Roca, J. Vitrià, J.J. Villanueva

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	389-392
Journal	Journal of Physics: Conference Series
Volume	135
Issue number	10
Publication status	Published - 1 Jan 1994

Cite this

@article{63b40cf9fce14c9f85e26d70ae32da67,

title = "Using defocus in optical inspection of integrated circuits",

author = "X. Binefa and J. S{\`a}nchez and F.X. P{\'e}rez and X. Roca and J. Vitri{\`a} and J.J. Villanueva",

year = "1994",

month = jan,

day = "1",

language = "English",

volume = "135",

pages = "389--392",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

number = "10",

}