Using AFM related techniques for the nanoscale electrical characterization of irradiated ultra-thin gate oxides

M. Porti, S. Gerardin, M. Nafría, X. Aymerich, A. Cester, A. Paccagnella

Research output: Contribution to journal › Article › Research › peer-review

19 Citations (Scopus)

Original language	English
Pages (from-to)	1891-1897
Journal	IEEE Transactions on Nuclear Science
Volume	54
DOIs	https://doi.org/10.1109/TNS.2007.909483
Publication status	Published - 1 Jan 2007

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title = "Using AFM related techniques for the nanoscale electrical characterization of irradiated ultra-thin gate oxides",

author = "M. Porti and S. Gerardin and M. Nafr{\'i}a and X. Aymerich and A. Cester and A. Paccagnella",

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AU - Porti, M.

AU - Gerardin, S.

AU - Nafría, M.

AU - Aymerich, X.

AU - Cester, A.

AU - Paccagnella, A.

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