TY - JOUR
T1 - Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators
AU - Juillard, Jerome
AU - Prache, Pierre
AU - Maris Ferreira, Pietro
AU - Barniol, Nuria
PY - 2018/12/1
Y1 - 2018/12/1
N2 - © 1986-2012 IEEE. In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultimate resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold, and that the resolution of such sensors is actually independent of the coupling strength. These results are established for different output metrics and operating points, in closed loop and in open loop, and compared to those obtained with other approaches based on actively coupled resonators.
AB - © 1986-2012 IEEE. In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultimate resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold, and that the resolution of such sensors is actually independent of the coupling strength. These results are established for different output metrics and operating points, in closed loop and in open loop, and compared to those obtained with other approaches based on actively coupled resonators.
KW - Coupled resonators
KW - Resonant sensors
KW - Thermomechanical noise
U2 - 10.1109/TUFFC.2018.2869415
DO - 10.1109/TUFFC.2018.2869415
M3 - Article
C2 - 30207952
SN - 0885-3010
VL - 65
SP - 2440
EP - 2448
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
M1 - 8458169
ER -