Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators

Jerome Juillard; Pierre Prache; Pietro Maris Ferreira; Nuria Barniol

doi:10.1109/TUFFC.2018.2869415

Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators

Jerome Juillard, Pierre Prache, Pietro Maris Ferreira, Nuria Barniol

Department of Electronic Engineering

Research output: Contribution to journal › Article › Research

9 Citations (Scopus)

Abstract

© 1986-2012 IEEE. In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultimate resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold, and that the resolution of such sensors is actually independent of the coupling strength. These results are established for different output metrics and operating points, in closed loop and in open loop, and compared to those obtained with other approaches based on actively coupled resonators.

Original language	English
Article number	8458169
Pages (from-to)	2440-2448
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	65
DOIs	https://doi.org/10.1109/TUFFC.2018.2869415
Publication status	Published - 1 Dec 2018

Keywords

Coupled resonators
Resonant sensors
Thermomechanical noise

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abstract = "{\textcopyright} 1986-2012 IEEE. In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultimate resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold, and that the resolution of such sensors is actually independent of the coupling strength. These results are established for different output metrics and operating points, in closed loop and in open loop, and compared to those obtained with other approaches based on actively coupled resonators.",

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AU - Prache, Pierre

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AU - Barniol, Nuria

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N2 - © 1986-2012 IEEE. In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultimate resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold, and that the resolution of such sensors is actually independent of the coupling strength. These results are established for different output metrics and operating points, in closed loop and in open loop, and compared to those obtained with other approaches based on actively coupled resonators.

AB - © 1986-2012 IEEE. In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultimate resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold, and that the resolution of such sensors is actually independent of the coupling strength. These results are established for different output metrics and operating points, in closed loop and in open loop, and compared to those obtained with other approaches based on actively coupled resonators.

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