Twin-mass accelerometer optimization to reduce the package stresses

José A. Plaza; Jaume Esteve; Carles Cané

doi:10.1016/S0924-4247(99)00312-X

Twin-mass accelerometer optimization to reduce the package stresses

José A. Plaza, Jaume Esteve, Carles Cané

Research output: Contribution to journal › Article › Research › peer-review

24 Citations (Scopus)

Abstract

The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.

Original language	English
Pages (from-to)	199-207
Journal	Sensors and Actuators, A: Physical
Volume	80
Issue number	3
DOIs	https://doi.org/10.1016/S0924-4247(99)00312-X
Publication status	Published - 15 Mar 2000

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title = "Twin-mass accelerometer optimization to reduce the package stresses",

abstract = "The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.",

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AU - Cané, Carles

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N2 - The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.

AB - The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.

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DO - 10.1016/S0924-4247(99)00312-X

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