Abstract
The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.
Original language | English |
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Pages (from-to) | 199-207 |
Journal | Sensors and Actuators, A: Physical |
Volume | 80 |
Issue number | 3 |
DOIs | |
Publication status | Published - 15 Mar 2000 |