Twin-mass accelerometer optimization to reduce the package stresses

José A. Plaza; Jaume Esteve; Carles Cané

doi:10.1016/S0924-4247(99)00312-X

Twin-mass accelerometer optimization to reduce the package stresses

José A. Plaza, Jaume Esteve, Carles Cané

Research output: Contribution to journal › Article › Research › peer-review

24 Citations (Scopus)

Abstract

The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.

Original language	English
Pages (from-to)	199-207
Journal	Sensors and Actuators, A: Physical
Volume	80
Issue number	3
DOIs	https://doi.org/10.1016/S0924-4247(99)00312-X
Publication status	Published - 15 Mar 2000

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@article{c372744ec0eb4cfc88ae455c684276fe,

title = "Twin-mass accelerometer optimization to reduce the package stresses",

abstract = "The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.",

author = "Plaza, {Jos{\'e} A.} and Jaume Esteve and Carles Can{\'e}",

year = "2000",

month = mar,

day = "15",

doi = "10.1016/S0924-4247(99)00312-X",

language = "English",

volume = "80",

pages = "199--207",

number = "3",

}

TY - JOUR

T1 - Twin-mass accelerometer optimization to reduce the package stresses

AU - Plaza, José A.

AU - Esteve, Jaume

AU - Cané, Carles

PY - 2000/3/15

Y1 - 2000/3/15

N2 - The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.

AB - The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.

U2 - 10.1016/S0924-4247(99)00312-X

DO - 10.1016/S0924-4247(99)00312-X

M3 - Article

VL - 80

SP - 199

EP - 207

IS - 3

ER -

Twin-mass accelerometer optimization to reduce the package stresses

Abstract

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