Twin-mass accelerometer optimization to reduce the package stresses

José A. Plaza, Jaume Esteve, Carles Cané

    Research output: Contribution to journalArticleResearchpeer-review

    24 Citations (Scopus)

    Abstract

    The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased.
    Original languageEnglish
    Pages (from-to)199-207
    JournalSensors and Actuators, A: Physical
    Volume80
    Issue number3
    DOIs
    Publication statusPublished - 15 Mar 2000

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