Towards VHF fully integrated microelectromechanical filters

J. Giner, A. Uranga, J. Verd, G. Murillo, E. Marigó, G. Abadal, F. Torres, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationMEMSWAVE 2009:proceedings of the 10th International Symposium on RF MEMS and RF Microsystems
Place of PublicationTrento (IT)
Publication statusPublished - 1 Jan 2009

Cite this