Towards a distributed architecture for MEMS integration

B. Lorente, J. Oliver, C. Ferrer

    Research output: Contribution to journalArticleResearch

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)470-475
    JournalSens. actuators, A, Phys.
    Volume115
    Issue number2-3
    DOIs
    Publication statusPublished - 1 Jan 2004

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