Topographic characterization of AFM grown SiO2 on Si

X. Blasco, D. Hill, M. Porti, M. Nafría, X. Aymerich

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@article{3f020ec05370472ab613d2996af818b6,

title = "Topographic characterization of AFM grown SiO2 on Si",

author = "X. Blasco and D. Hill and M. Porti and M. Nafr{\'i}a and X. Aymerich",

year = "2001",

month = jan,

day = "1",

doi = "10.1088/0957-4484/12/2/307",

language = "English",

volume = "12",

pages = "110--112",

journal = "Nanotechnology",

issn = "0957-4484",

}