Time-resolved evaporation rate of attoliter glycerine drops using on-chip CMOS mass sensors based on resonant silicon Micro cantilevers

Maria Villarroya Gaudó, Gabriel Abadal, Jaume Verd, Jordi Teva, Francesc Pérez-Murano, Eduardo Figueras Costa, Josep Montserrat, Arantxa Uranga, Jaume Esteve, Núria Barniol

Research output: Contribution to journalArticleResearchpeer-review

9 Citations (Scopus)

Abstract

The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass. © 2007 IEEE.
Original languageEnglish
Pages (from-to)509-512
JournalIEEE Transactions on Nanotechnology
Volume6
Issue number5
DOIs
Publication statusPublished - 1 Sep 2007

Keywords

  • Attoliter
  • Cantilever based mass sensor
  • CMOS-MEMS
  • Dynamics of evaporation
  • Evaporation rate

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