Thermal and Mechanical Aspects for Designing Micromachined Low-Power Gas Sensors

A. Götz, I. Gràcia, C. Cané, E. Lora-Tamayo

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	247-252
Journal	Journal of Micromechanics and Microengineering
Volume	7
Issue number	3
Publication status	Published - 1 Sept 1997

Cite this

TY - JOUR

T1 - Thermal and Mechanical Aspects for Designing Micromachined Low-Power Gas Sensors

AU - Götz, A.

AU - Gràcia, I.

AU - Cané, C.

AU - Lora-Tamayo, E.

PY - 1997/9/1

Y1 - 1997/9/1

UR - https://www.scopus.com/pages/publications/0031223156

M3 - Article

SN - 0960-1317

VL - 7

SP - 247

EP - 252

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 3

ER -