Thermal and Mechanical Aspects for Designing Micromachined Low-Power Gas Sensors

A. Götz, I. Gràcia, C. Cané, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearch

    43 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)247-252
    JournalJournal of Micromechanics and Microengineering
    Volume7
    Issue number3
    Publication statusPublished - 1 Sep 1997

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