Thermal and Mechanical Aspects for Designing Micromachined Low-Power Gas Sensors

A. Götz, I. Gràcia, C. Cané, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearch

    43 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)247-252
    JournalJournal of Micromechanics and Microengineering
    Volume7
    Issue number3
    Publication statusPublished - 1 Sep 1997

    Cite this

    Götz, A., Gràcia, I., Cané, C., & Lora-Tamayo, E. (1997). Thermal and Mechanical Aspects for Designing Micromachined Low-Power Gas Sensors. Journal of Micromechanics and Microengineering, 7(3), 247-252.