Theoretical and experimental investigations of single- and multilayer structures with SiGe nanoislands

V. O. Yukhymchuk, A. M. Yaremko, M. Ya Valakh, A. V. Novikov, E. V. Mozdor, P. M. Lytvyn, Z. F. Krasilnik, V. P. Klad'ko, V. M. Dzhagan, N. Mestres, J. Pascual

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9 Citations (Scopus)

Abstract

The influence of geometrical and physical parameters of self-assembled SiGe/Si nanoislands on their energy has been investigated theoretically. The island energy minimum was shown to depend on the growth temperature and Si content in the islands. The results of the theoretical calculations are compared with experimental data obtained by atomic force microscopy and Raman spectroscopy (RS). © 2003 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)1027-1031
JournalMaterials Science and Engineering C
Volume23
Issue number6-8
DOIs
Publication statusPublished - 15 Dec 2003

Keywords

  • AFM
  • Elastic strain
  • GeSi nanoislads
  • Raman
  • X-ray

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