The thermal growth of very thin SiO2 films: a diffusion-controlled process

Translated title of the contribution: The thermal growth of very thin SiO2 films: a diffusion-controlled process

E. Farrés, J. Suñé, I. Placencia, N. Barniol, X. Aymerich

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Translated title of the contributionThe thermal growth of very thin SiO2 films: a diffusion-controlled process
Original languageMultiple languages
Pages (from-to)167-175
JournalPhysica status solidi. A, Applied research
Volume114
Publication statusPublished - 1 Jan 1989

Cite this