Test structures for MCM-D Technology Characterization

M. Lozano, J. Santander, E. Cabruna, C. Perelló, M. Ullán, LORA-TAMAYO E., R. Doyle, G. Mc Carthy, J. Barton

    Research output: Contribution to journalArticleResearch

    7 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)184-192
    JournalIEEE Transactions on Semiconductor Manufacturing
    Volume12
    Issue number2
    DOIs
    Publication statusPublished - 1 Jan 1999

    Cite this