Test structures for MCM-D Technology Characterization

M. Lozano, J. Santander, E. Cabruna, C. Perelló, M. Ullán, LORA-TAMAYO E., R. Doyle, G. Mc Carthy, J. Barton

    Research output: Contribution to journalArticleResearch

    7 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)184-192
    JournalIEEE Transactions on Semiconductor Manufacturing
    Volume12
    Issue number2
    DOIs
    Publication statusPublished - 1 Jan 1999

    Cite this

    Lozano, M., Santander, J., Cabruna, E., Perelló, C., Ullán, M., E., LORA-TAMAYO., Doyle, R., Carthy, G. M., & Barton, J. (1999). Test structures for MCM-D Technology Characterization. IEEE Transactions on Semiconductor Manufacturing, 12(2), 184-192. https://doi.org/10.1109/66.762876