TY - JOUR
T1 - Tent-Plate AlN PMUT with a Piston-Like Shape under Liquid Operation
AU - Ledesma, Eyglis
AU - Zamora, Ivan
AU - Uranga, Arantxa
AU - Barniol, Nuria
N1 - Funding Information:
Manuscript received April 7, 2020; revised May 6, 2020; accepted May 11, 2020. Date of publication May 19, 2020; date of current version September 3, 2020. This work was supported in part by the MINECO/ FEDER Project under Grant TEC2015-66337-R. The associate editor coordinating the review of this article and approving it for publication was Prof. Sheng-Shian Li. (Corresponding author: Núria Barniol.) The authors are with the Departament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, 08193 Barcelona, Spain (e-mail: [email protected]; [email protected]; arantxa.uranga@ uab.es; [email protected]). Digital Object Identifier 10.1109/JSEN.2020.2995643
Publisher Copyright:
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Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/10/1
Y1 - 2020/10/1
N2 - In this work, a waterproof tent-plate piezoelectric micromachined ultrasonic transducer (PMUT) with enhanced performance as actuator and sensor in comparison with standard clamped PMUT is presented. The squared AlN PMUT has four linear holes that are sealed by the passive layer allowing to increase the movement and giving the capability to work in liquid environment. The dimension of the holes was optimized to increase the PMUT displacement at least twice in relation with the regular clamped device. The acoustic performance of the PMUT was simulated in COMSOL Multiphysics and the results were experimentally verified under liquid operation. The experimental transmitting sensitivity, 3.9 kPa/V, as well as the sensor sensitivity, 13.4 V/MPa, provide a 2x factor improvement in contrast with the clamped PMUT with competitive values. Additionally, the presented tent-plate PMUT provides advantages in relation with the area, cost, power consumption and imaging quality thanks to the capability to be monolithically integrated over CMOS substrates.
AB - In this work, a waterproof tent-plate piezoelectric micromachined ultrasonic transducer (PMUT) with enhanced performance as actuator and sensor in comparison with standard clamped PMUT is presented. The squared AlN PMUT has four linear holes that are sealed by the passive layer allowing to increase the movement and giving the capability to work in liquid environment. The dimension of the holes was optimized to increase the PMUT displacement at least twice in relation with the regular clamped device. The acoustic performance of the PMUT was simulated in COMSOL Multiphysics and the results were experimentally verified under liquid operation. The experimental transmitting sensitivity, 3.9 kPa/V, as well as the sensor sensitivity, 13.4 V/MPa, provide a 2x factor improvement in contrast with the clamped PMUT with competitive values. Additionally, the presented tent-plate PMUT provides advantages in relation with the area, cost, power consumption and imaging quality thanks to the capability to be monolithically integrated over CMOS substrates.
KW - MEMS-on-CMOS
KW - piezoelectric micromachined ultrasonic transducer (PMUT)
KW - receiving sensitivity
KW - transmitting sensitivity
UR - http://www.scopus.com/inward/record.url?scp=85090039520&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2020.2995643
DO - 10.1109/JSEN.2020.2995643
M3 - Artículo
AN - SCOPUS:85090039520
SN - 1530-437X
VL - 20
SP - 11128
EP - 11137
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 19
M1 - 9096364
ER -