Synthesis of SiC Microstructures in Si Technology by High Dose Carbon Implantation: Etch-Stop Properties

C. Serre, A. Pérez Rodríguez, A. Romano Rodríguez, L. Calvo Barrio, J.R. Morante, J. Esteve, M.C. Acero, W. Skorupa, R. Kögler

    Research output: Contribution to journalArticleResearch

    19 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2211-2215
    JournalJ. Electrochem. Soc.
    Issue number6
    Publication statusPublished - 1 Jun 1997

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