Original language | English |
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Pages (from-to) | 80-83 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 6 |
Issue number | 1 |
Publication status | Published - 1 Jan 1996 |
Surface micromachining technology applied to the fabrication of a FET pressure sensor
L. Svensson, J. A. Plaza, M. A. Benitez, J. Esteve, E. Lora-Tamayo
Research output: Contribution to journal › Article › Research
22
Citations
(Scopus)