Surface micromachining technology applied to the fabrication of a FET pressure sensor

L. Svensson, J. A. Plaza, M. A. Benitez, J. Esteve, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearch

    21 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)80-83
    JournalJournal of Micromechanics and Microengineering
    Volume6
    Issue number1
    Publication statusPublished - 1 Jan 1996

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