Surface micromachining technology applied to the fabrication of a FET pressure sensor

L. Svensson, J. A. Plaza, M. A. Benitez, J. Esteve, E. Lora-Tamayo

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	80-83
Journal	Journal of Micromechanics and Microengineering
Volume	6
Issue number	1
Publication status	Published - 1 Jan 1996

Cite this

@article{9f8448cbbb52497b9e785c10187c44ac,

title = "Surface micromachining technology applied to the fabrication of a FET pressure sensor",

author = "L. Svensson and Plaza, {J. A.} and Benitez, {M. A.} and J. Esteve and E. Lora-Tamayo",

year = "1996",

month = jan,

day = "1",

language = "English",

volume = "6",

pages = "80--83",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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TY - JOUR

T1 - Surface micromachining technology applied to the fabrication of a FET pressure sensor

AU - Svensson, L.

AU - Plaza, J. A.

AU - Benitez, M. A.

AU - Esteve, J.

AU - Lora-Tamayo, E.

PY - 1996/1/1

Y1 - 1996/1/1

M3 - Article

VL - 6

SP - 80

EP - 83

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 1

ER -