Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles

Guillermo Sobreviela; Gabriel Vidal-Álvarez; Martín Riverola; Arantxa Uranga; Francesc Torres; Núria Barniol

doi:https://doi.org/10.1016/j.sna.2017.01.004

Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles

Guillermo Sobreviela, Gabriel Vidal-Álvarez, Martín Riverola, Arantxa Uranga, Francesc Torres, Núria Barniol

Research output: Contribution to journal › Article › Research › peer-review

15 Citations (Scopus)

Abstract

© 2017 Elsevier B.V. We study the nonlinear behavior of a microelectromechanical resonator implemented using the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response, two hysteretic cycles of different origin: mechanical and electrical. We observe that, by increasing the resonator DC voltage, the resonator goes from having a purely mechanical (hardening) nonlinear response to a purely electrical (softening) one, experiencing a mixed regime where mechanical and electrical nonlinearities coexist and partially compensate. We explain how the compensation between nonlinearities can be used to improve the phase noise of an MEMS-based oscillator. Specifically, we show that it is possible to operate the resonator at the top bifurcation point, while at the same time suppressing the amplitude-mediated frequency noise.

Original language	English
Pages (from-to)	59-65
Journal	Sensors and Actuators, A: Physical
Volume	256
DOIs	https://doi.org/10.1016/j.sna.2017.01.004
Publication status	Published - 1 Apr 2017

Keywords

A-f effect
Capacitive transduction
Microelectromechanical systems
Nonlinear resonators
Nonlinearities compensation
Oscillators

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https://doi.org/10.1016/j.sna.2017.01.004

Cite this

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title = "Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles",

abstract = "{\textcopyright} 2017 Elsevier B.V. We study the nonlinear behavior of a microelectromechanical resonator implemented using the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response, two hysteretic cycles of different origin: mechanical and electrical. We observe that, by increasing the resonator DC voltage, the resonator goes from having a purely mechanical (hardening) nonlinear response to a purely electrical (softening) one, experiencing a mixed regime where mechanical and electrical nonlinearities coexist and partially compensate. We explain how the compensation between nonlinearities can be used to improve the phase noise of an MEMS-based oscillator. Specifically, we show that it is possible to operate the resonator at the top bifurcation point, while at the same time suppressing the amplitude-mediated frequency noise.",

keywords = "A-f effect, Capacitive transduction, Microelectromechanical systems, Nonlinear resonators, Nonlinearities compensation, Oscillators",

author = "Guillermo Sobreviela and Gabriel Vidal-{\'A}lvarez and Mart{\'i}n Riverola and Arantxa Uranga and Francesc Torres and N{\'u}ria Barniol",

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language = "English",

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TY - JOUR

T1 - Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles

AU - Sobreviela, Guillermo

AU - Vidal-Álvarez, Gabriel

AU - Riverola, Martín

AU - Uranga, Arantxa

AU - Torres, Francesc

AU - Barniol, Núria

PY - 2017/4/1

Y1 - 2017/4/1

N2 - © 2017 Elsevier B.V. We study the nonlinear behavior of a microelectromechanical resonator implemented using the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response, two hysteretic cycles of different origin: mechanical and electrical. We observe that, by increasing the resonator DC voltage, the resonator goes from having a purely mechanical (hardening) nonlinear response to a purely electrical (softening) one, experiencing a mixed regime where mechanical and electrical nonlinearities coexist and partially compensate. We explain how the compensation between nonlinearities can be used to improve the phase noise of an MEMS-based oscillator. Specifically, we show that it is possible to operate the resonator at the top bifurcation point, while at the same time suppressing the amplitude-mediated frequency noise.

AB - © 2017 Elsevier B.V. We study the nonlinear behavior of a microelectromechanical resonator implemented using the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response, two hysteretic cycles of different origin: mechanical and electrical. We observe that, by increasing the resonator DC voltage, the resonator goes from having a purely mechanical (hardening) nonlinear response to a purely electrical (softening) one, experiencing a mixed regime where mechanical and electrical nonlinearities coexist and partially compensate. We explain how the compensation between nonlinearities can be used to improve the phase noise of an MEMS-based oscillator. Specifically, we show that it is possible to operate the resonator at the top bifurcation point, while at the same time suppressing the amplitude-mediated frequency noise.

KW - A-f effect

KW - Capacitive transduction

KW - Microelectromechanical systems

KW - Nonlinear resonators

KW - Nonlinearities compensation

KW - Oscillators

U2 - https://doi.org/10.1016/j.sna.2017.01.004

DO - https://doi.org/10.1016/j.sna.2017.01.004

M3 - Article

VL - 256

SP - 59

EP - 65

ER -

Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles

Abstract

Keywords

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