Study of the influence of nonuniform pupils in photolitographic systems through the apparent transfer function

M.J. Yzuel, R. Hild, J. Campos, J.C. Escalera

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)369-377
JournalProc. - SPIE
Volume0
Issue number2774
Publication statusPublished - 1 Jan 1996

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