Structural, morphological and local electric properties of TiO<inf>2</inf> thin films grown by pulsed laser deposition

E. György; A. Pérez Del Pino; G. Sauthier; A. Figueras; F. Alsina; J. Pascual

doi:10.1088/0022-3727/40/17/035

Structural, morphological and local electric properties of TiO<inf>2</inf> thin films grown by pulsed laser deposition

E. György, A. Pérez Del Pino, G. Sauthier, A. Figueras, F. Alsina, J. Pascual

Department of Physics

Research output: Contribution to journal › Article › Research › peer-review

38 Citations (Scopus)

Abstract

Titanium dioxide (TiO2) thin films were synthesized on (1 0 0) Si substrates by reactive pulsed laser deposition (PLD) technique. A frequency quadrupled Nd : YAG (λ ≤ 266 nm, τFWHM ≅ 5 ns, ν ≤ 10 Hz) laser source was used for the irradiations of metallic Ti targets. The experiments were performed in controlled oxygen atmosphere. Crystallinity, surface morphology and local electric properties of the obtained oxide thin films were investigated by x-ray diffractometry, micro-Raman spectroscopy and current sensing atomic force microscopy. An inter-relation was found between the surface morphology, the crystalline structure and the nano-scale electric properties which open the possibility of synthesizing by the PLD technique TiO2 thin films with tunable functional properties for future applications such as photocatalysts, gas sensors or solar energy converters. © 2007 IOP Publishing Ltd.

Original language	English
Article number	035
Pages (from-to)	5246-5251
Journal	Journal Physics D: Applied Physics
Volume	40
Issue number	17
DOIs	https://doi.org/10.1088/0022-3727/40/17/035
Publication status	Published - 7 Sep 2007

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10.1088/0022-3727/40/17/035

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title = "Structural, morphological and local electric properties of TiO2 thin films grown by pulsed laser deposition",

abstract = "Titanium dioxide (TiO2) thin films were synthesized on (1 0 0) Si substrates by reactive pulsed laser deposition (PLD) technique. A frequency quadrupled Nd : YAG (λ ≤ 266 nm, τFWHM ≅ 5 ns, ν ≤ 10 Hz) laser source was used for the irradiations of metallic Ti targets. The experiments were performed in controlled oxygen atmosphere. Crystallinity, surface morphology and local electric properties of the obtained oxide thin films were investigated by x-ray diffractometry, micro-Raman spectroscopy and current sensing atomic force microscopy. An inter-relation was found between the surface morphology, the crystalline structure and the nano-scale electric properties which open the possibility of synthesizing by the PLD technique TiO2 thin films with tunable functional properties for future applications such as photocatalysts, gas sensors or solar energy converters. {\textcopyright} 2007 IOP Publishing Ltd.",

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doi = "10.1088/0022-3727/40/17/035",

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Structural, morphological and local electric properties of TiO<inf>2</inf> thin films grown by pulsed laser deposition. / György, E.; Pérez Del Pino, A.; Sauthier, G.; Figueras, A.; Alsina, F.; Pascual, J.

In: Journal Physics D: Applied Physics, Vol. 40, No. 17, 035, 07.09.2007, p. 5246-5251.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Structural, morphological and local electric properties of TiO2 thin films grown by pulsed laser deposition

AU - György, E.

AU - Pérez Del Pino, A.

AU - Sauthier, G.

AU - Figueras, A.

AU - Alsina, F.

AU - Pascual, J.

PY - 2007/9/7

Y1 - 2007/9/7

N2 - Titanium dioxide (TiO2) thin films were synthesized on (1 0 0) Si substrates by reactive pulsed laser deposition (PLD) technique. A frequency quadrupled Nd : YAG (λ ≤ 266 nm, τFWHM ≅ 5 ns, ν ≤ 10 Hz) laser source was used for the irradiations of metallic Ti targets. The experiments were performed in controlled oxygen atmosphere. Crystallinity, surface morphology and local electric properties of the obtained oxide thin films were investigated by x-ray diffractometry, micro-Raman spectroscopy and current sensing atomic force microscopy. An inter-relation was found between the surface morphology, the crystalline structure and the nano-scale electric properties which open the possibility of synthesizing by the PLD technique TiO2 thin films with tunable functional properties for future applications such as photocatalysts, gas sensors or solar energy converters. © 2007 IOP Publishing Ltd.

AB - Titanium dioxide (TiO2) thin films were synthesized on (1 0 0) Si substrates by reactive pulsed laser deposition (PLD) technique. A frequency quadrupled Nd : YAG (λ ≤ 266 nm, τFWHM ≅ 5 ns, ν ≤ 10 Hz) laser source was used for the irradiations of metallic Ti targets. The experiments were performed in controlled oxygen atmosphere. Crystallinity, surface morphology and local electric properties of the obtained oxide thin films were investigated by x-ray diffractometry, micro-Raman spectroscopy and current sensing atomic force microscopy. An inter-relation was found between the surface morphology, the crystalline structure and the nano-scale electric properties which open the possibility of synthesizing by the PLD technique TiO2 thin films with tunable functional properties for future applications such as photocatalysts, gas sensors or solar energy converters. © 2007 IOP Publishing Ltd.

U2 - 10.1088/0022-3727/40/17/035

DO - 10.1088/0022-3727/40/17/035

M3 - Article

VL - 40

SP - 5246

EP - 5251

IS - 17

M1 - 035

ER -

Structural, morphological and local electric properties of TiO<inf>2</inf> thin films grown by pulsed laser deposition

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