Structural Characterization of poly-SiC on a SiO\sub 2\sub \nosub /Si by OMCVD

J. Rodriguez-Viejo, J. Stoemenos, N. Clavaguera, M.T. Clavaguera-Mora

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)217-222
JournalSolid State Phenomena
Issue number51-52
Publication statusPublished - 1 Jan 1996

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