Stress in poly-SiC films grown by low pressure CVD

J. Rodríguez-Viejo, E. Hurtós, R. Kressmann, M.T. Clavaguera-Mora

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)477-482
JournalMat. sci. forum
Volume347
Issue number3
Publication statusPublished - 1 Jan 2000

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