Strategies for CMOS-MEMS integration in a submicrometric commercial CMOS technology

J L Lopez, J Verd, J Teva, G. Murillo, J. Giner, F. Torres, A. Uranga, G. Abadal, N. Barniol

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)---
JournalJournal of micromechanics and microengineering : structures, devices and systems
Volume19
Publication statusPublished - 1 Jan 2009

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Lopez, J. L., Verd, J., Teva, J., Murillo, G., Giner, J., Torres, F., Uranga, A., Abadal, G., & Barniol, N. (2009). Strategies for CMOS-MEMS integration in a submicrometric commercial CMOS technology. Journal of micromechanics and microengineering : structures, devices and systems, 19, ---.