Strategies for CMOS-MEMS integration in a submicrometric commercial CMOS technology

J L Lopez, J Verd, J Teva, G. Murillo, J. Giner, F. Torres, A. Uranga, G. Abadal, N. Barniol

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	---
Journal	Journal of micromechanics and microengineering : structures, devices and systems
Volume	19
Publication status	Published - 1 Jan 2009

Cite this

@article{c9106d1b7c6744548df2ea6411fecd3c,

title = "Strategies for CMOS-MEMS integration in a submicrometric commercial CMOS technology",

author = "Lopez, {J L} and J Verd and J Teva and G. Murillo and J. Giner and F. Torres and A. Uranga and G. Abadal and N. Barniol",

year = "2009",

month = jan,

day = "1",

language = "English",

volume = "19",

pages = "------",

}