Statistics of soft and hard breakdown in thin SiO2 gate oxides

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17 Citations (Scopus)

Original language	English
Pages (from-to)	1185-1192
Journal	Microelectronics Reliability
Volume	43
DOIs	https://doi.org/10.1016/S0026-2714(03)00170-7
Publication status	Published - 1 Jan 2003

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@article{9b3b876d51ca43ad9b90c3e792a386ae,

title = "Statistics of soft and hard breakdown in thin SiO2 gate oxides",

author = "J. Su{\~n}{\'e} and E. Wu and D. Jim{\'e}nez and W. Lai",

year = "2003",

month = jan,

day = "1",

doi = "10.1016/S0026-2714(03)00170-7",

language = "English",

volume = "43",

pages = "1185--1192",

journal = "Microelectronics Reliability",

issn = "0026-2714",

publisher = "Elsevier Limited",

}