Statistics of soft and hard breakdown in thin SiO2 gate oxides

J. Suñé, E. Wu, D. Jiménez, W. Lai

Research output: Contribution to journalArticleResearch

15 Citations (Scopus)
Original languageEnglish
Pages (from-to)1185-1192
JournalMicroelectronics Reliability
Volume43
DOIs
Publication statusPublished - 1 Jan 2003

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