Split ring resonators (SRRs) based on micro-electro-mechanical deflectable cantilever-type rings: Application to tunable stopband filters

David Bouyge, David Mardivirin, Jordi Bonache, Aurelian Crunteanu, Arnaud Pothier, Miguel Durán-Sindreu, Pierre Blondy, Ferran Martín

Research output: Contribution to journalArticleResearchpeer-review

39 Citations (Scopus)

Abstract

A new principle for the implementation of tunable split ring resonators (SRRs) is presented. The rings forming the SRRs are partly fixed to the substrate (anchor) and partly suspended (up-curved cantilever). Through electrostatic actuation, the suspended parts are deflected down, the distributed capacitance between the pair of coupled rings is modified, and hence the resonance frequency of the SRR can be electrically tuned. To obtain electrically movable rings, a cantilever-type micro-electro-mechanical-system (MEMS) design and fabrication process is applied. The resonance frequencies at the different switching states are measured by coupling the tunable SRR to a host microstrip line, and reveal that significant tuning ranges can be achieved. This novel tuning concept is applied to the implementation of tunable stopband filters at Ku band as proof-of-concept demonstrators. © 2011 IEEE.
Original languageEnglish
Article number5739123
Pages (from-to)243-245
JournalIEEE Microwave and Wireless Components Letters
Volume21
DOIs
Publication statusPublished - 1 May 2011

Keywords

  • MEMS systems
  • metamaterials
  • microstrip technology
  • split ring resonators (SRRs)
  • tunable filters

Fingerprint Dive into the research topics of 'Split ring resonators (SRRs) based on micro-electro-mechanical deflectable cantilever-type rings: Application to tunable stopband filters'. Together they form a unique fingerprint.

Cite this